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Structural study of thermal-oxide films on silicon by cathodoluminescence

✍ Scribed by M. V. Zamoryanskaya; V. I. Sokolov

Book ID: 110118747
Publisher: SP MAIK Nauka/Interperiodica
Year: 1998
Tongue: English
Weight: 107 KB
Volume: 40
Category: Article
ISSN: 1063-7834
DOI: 10.1134/1.1130659

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