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Characterization of thin textured tunnel oxide prepared by thermal oxidation of thin polysilicon film on silicon

โœ Scribed by Shye Lin Wu; De Ming Chiao; Chung Len Lee; Tan Fu Lei

Book ID
114536405
Publisher
IEEE
Year
1996
Tongue
English
Weight
1015 KB
Volume
43
Category
Article
ISSN
0018-9383

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