In this work the oxidation resistance of DC reactive sputtered niobium oxynitrides and its influence on the properties of the films are studied. The depositions have been carried out by DC magnetron sputtering with a reactive gas pulsing process. The nitrogen flow was kept constant and the oxygen fl
✦ LIBER ✦
Structural study of the oxidation process and stability of NbOxNy coatings
✍ Scribed by J.M. Chappé; P. Carvalho; A.V. Machado; F. Vaz; E. Alves; N.P. Barradas; M. Fenker; H. Kappl
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 670 KB
- Volume
- 266
- Category
- Article
- ISSN
- 0168-583X
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