Structural study of initial layer for μc-Si:H growth using real time in situ spectroscopic ellipsometry and infrared spectroscopy

✍ Scribed by H Fujiwara; Y Toyoshima; M Kondo; A Matsuda

• Book ID: 117150248
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 168 KB
• Volume: 266-269
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(99)00715-2