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Structural-phase transformations in SiOxfilms in the course of vacuum heat treatment

✍ Scribed by I. P. Lisovskyy; I. Z. Indutnyy; B. N. Gnennyy; P. M. Lytvyn; D. O. Mazunov; A. S. Oberemok; N. V. Sopinskyy; P. E. Shepelyavyi

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