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Kinetics of structural and phase transformations in thin SiOxfilms in the course of a rapid thermal annealing

✍ Scribed by V. A. Dan’ko; I. Z. Indutnyi; V. S. Lysenko; I. Yu. Maidanchuk; V. I. Min’ko; A. N. Nazarov; A. S. Tkachenko; P. E. Shepelyavyi


Book ID
110144225
Publisher
Springer
Year
2005
Tongue
English
Weight
137 KB
Volume
39
Category
Article
ISSN
1063-7826

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