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Structural, optical and electronical properties of mixed dielectric films

✍ Scribed by R Thielsch; W Meiling; E Göring


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
372 KB
Volume
41
Category
Article
ISSN
0042-207X

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**Mesoporous hybrid inorganic–organic silicate films** with pendant methyl groups are prepared. With a high organic fraction, these films are hydrophobic, which is important in the fabrication of low‐k dielectrics. The refractive index of layers with smaller organic fraction can be switched reversib