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Controlling Dielectric and Optical Properties of Ordered Mesoporous Organosilicate Films

✍ Scribed by A.R. Balkenende; F.K. de Theije; J.C.K. Kriege

Publisher: John Wiley and Sons
Year: 2003
Tongue: English
Weight: 224 KB
Volume: 15
Category: Article
ISSN: 0935-9648
DOI: 10.1002/adma.200390028

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✦ Synopsis

Mesoporous hybrid inorganic–organic silicate films with pendant methyl groups are prepared. With a high organic fraction, these films are hydrophobic, which is important in the fabrication of low‐k dielectrics. The refractive index of layers with smaller organic fraction can be switched reversibly over a large refractive index interval by varying the relative humidity (see Figure).

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