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Structural, optical and electronic properties of oxidized AIN thin films at different temperatures

✍ Scribed by Enam Ahmed Chowdhury; M. Dashiell; G. Qiu; J. O. Olowolafe; R. Jonczyk; D. Smith; A. Barnett; J. Kolodzey; K. M. Unruh; C. P. Swann; John Suehle; Yuan Chen

Book ID
107457723
Publisher
Springer US
Year
1998
Tongue
English
Weight
523 KB
Volume
27
Category
Article
ISSN
0361-5235

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## Abstract The structural, optical, and electronic properties of nanocrystalline diamond thin films grown from a hydrogen‐rich CH~4~/H~2~ gas phase via hot filament (HF) CVD and of ultrananocrystalline diamond thin films grown from an argon‐rich sp^2^ gas phase via microwave plasma enhanced (MPE)