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Chemical compositions and optical properties of HfOxNy thin films at different substrate temperatures

โœ Scribed by M. Liu; Q. Fang; G. He; L.Q. Zhu; S.S. Pan; L.D. Zhang

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
163 KB
Volume
9
Category
Article
ISSN
1369-8001

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