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Structural investigation of Al2O3 formed by ion implantation at various doses

✍ Scribed by P.S. Pawar; D.C. Kothari; A.M. Narsale; P.M. Raole; S.V. Gogawale; L. Guzman; S. Girardi; M. Dapor; M. Anderle; R. Canteri

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