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Structural characterization of nc-Si films grown by low-energy PECVD on different substrates

✍ Scribed by A. Le Donne; S. Binetti; G. Isella; B. Pichaud; M. Texier; M. Acciarri; S. Pizzini


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
1010 KB
Volume
254
Category
Article
ISSN
0169-4332

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