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Structural characterization of amorphous SiCxNy chemical vapor deposited coatings

✍ Scribed by Bendeddouche, A.; Berjoan, R.; Beche, E.; Merle-Mejean, T.; Schamm, S.; Serin, V.; Taillades, G.; Pradel, A.; Hillel, R.

Book ID: 115545187
Publisher: American Institute of Physics
Year: 1997
Tongue: English
Weight: 452 KB
Volume: 81
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.364396

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