The change of stoichiometric ratio caused by the increase in sputtering power in Al-doped ZnO (AZO) films was investigated, where the films were grown by pulsed dc magnetron sputtering with a cylindrical target. The properties of the films were strongly affected by the sputtering power. Lower sputte
โฆ LIBER โฆ
Structural and physical properties of Ni and Al co-doped ZnO films grown on glass by direct current magnetron co-sputtering
โ Scribed by Mingpeng Yu; Hong Qiu; Xiaobai Chen; Hongxi Liu; Mingwen Wang
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 403 KB
- Volume
- 404
- Category
- Article
- ISSN
- 0921-4526
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