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Structural and optical properties of ZnO film by plasma-assisted MOCVD

✍ Scribed by X. Wang; S. Yang; J. Wang; M. Li; X. Jiang; G. Du; X. Liu; R.P.H. Chang


Book ID
110391964
Publisher
Springer
Year
2002
Tongue
English
Weight
328 KB
Volume
34
Category
Article
ISSN
0306-8919

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## Abstract Sb‐doped zinc oxide (ZnO) films grown by metal organic chemical vapor deposition (MOCVD) were investigated. The influence of Sb‐doping concentration on the optical and structural properties of ZnO was investigated. The deep‐level emission was suppressed gradually by Sb doping. The grain