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Influence of annealing on the structural and optical properties of ZnO films grown by MOCVD

✍ Scribed by Jianfeng Su; Changqing Wang; Chunjuan Tang; Qiang Niu; Yongsheng Zhang; Zhuxi Fu


Book ID
116608375
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
425 KB
Volume
509
Category
Article
ISSN
0925-8388

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## Abstract Sb‐doped zinc oxide (ZnO) films grown by metal organic chemical vapor deposition (MOCVD) were investigated. The influence of Sb‐doping concentration on the optical and structural properties of ZnO was investigated. The deep‐level emission was suppressed gradually by Sb doping. The grain