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Structural and optical properties of AlN/Si system

✍ Scribed by Renu Dhunna; Chhagan Lal; Veenu Sisodia; D.K. Avasthi; V. Ganesan; I.P. Jain


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
416 KB
Volume
11
Category
Article
ISSN
1369-8001

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Structural, magnetic and electrical prop
✍ Chhagan Lal; Renu Dhunna; I.P. Jain πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 274 KB

Interface studies in metal/semiconductor systems are important due to their potential technological application in microelectronics. A total of 80 nm Fe film was deposited on Si(111) substrate using electron beam evaporation technique at a vacuum of 2 Γ‚ 10 Γ€7 Torr. The samples were annealed at tempe