Characterization of AlxInyGa1−x−yN quate
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M.A. Abid; H. Abu Hassan; Z. Hassan; S.S. Ng; S.K. Mohd Bakhori; N.H.Abd. Raof
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Article
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2011
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Elsevier Science
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English
⚖ 761 KB
High-resolution X-ray diffraction (HR-XRD) with rocking curve, atomic force microscopy (AFM) and photoluminescence (PL) spectroscopy have been performed on highquality quaternary Al x In y Ga 1 À x À y N thin films at room temperature. The Al x In y Ga 1 À x À y N films were grown on c-plane (0 0 0