Characterization of silicon carbide thin
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P. Zanola; E. Bontempi; C. Ricciardi; G. Barucca; L.E. Depero
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Article
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2004
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Elsevier Science
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English
⚖ 227 KB
Due to its outstanding electrical and mechanical properties, silicon carbide (SiC) is considered a leading semiconducting material for high temperature sensors. Since the piezoresistive effect in SiC is highly anisotropic and exhibits a dependence on the crystal orientation, the role of the substra