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Structural and mechanical evolution of reactively and non-reactively sputtered Zr–Al–N thin films during annealing

✍ Scribed by Mayrhofer, P.H.; Sonnleitner, D.; Bartosik, M.; Holec, D.

Book ID
123140850
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
976 KB
Volume
244
Category
Article
ISSN
0257-8972

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Cr-Zr-Si-N thin films with various Zr contents were deposited by a bipolar asymmetric pulsed DC reactive magnetron sputtering system. In addition, a Cr-Zr-N film without Si addition was fabricated as a reference. The influence of Zr on the constitution, microstructure, mechanical, tribological and e