Structural and electronic characterization of β-SiC films on Si grown from mono-methylsilane precursors

✍ Scribed by G. Krötz; W. Legner; G. Müller; H.W. Grueninger; L. Snith; B. Leese; A. Jones; S. Rushworth

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 353 KB
• Volume: 29
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(94)04029-4