Cadmium titanate, CdTiO 3 , was prepared by the sol-gel technique in bulk and in thin film form. The thermal evolution of the gels and the phase changes were studied by thermogravimetric analysis (TGA), X-ray diffractometry (XRD) and Raman and energy-dispersive (EDS) spectroscopies. The morphology of the samples was observed using scanning electron microscopy (SEM). Gels heated to 800 °C gave rise to powders with only the ilmenite-like phase. The orthorhombic perovskite phase is the only crystalline phase observed after a 4 h heattreatment at 1100 °C. With respect to the conventional preparation method by solidstate reaction, by the sol-gel method it is possible to prepare the ilmenite phase at lower temperatures and the perovskite phase in a shorter time. Clear, homogeneous thin films were obtained by the dip-coating method. The refraction index and the thickness of the films were measured using ellipsometry. The humidity-sensitive electrical properties were measured for thin films deposited on alumina substrates with comb-type gold electrodes, heated to 200 °C and 450 °C. The films heated to 200 °C, which still contained organics, showed a variation of the resistance of six orders of magnitude in the relative humidity (RH) range tested (4-87% RH). The films heated to 450 °C, made of ilmenite-type CdTiO 3 , were nearly insensitive to RH.