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Structural and biocompatible characterization of TiC/a:C nanocomposite thin films

✍ Scribed by Balázsi, K.; Vandrovcová, M.; Bačáková, L.; Balázsi, Cs.


Book ID
123313822
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
1018 KB
Volume
33
Category
Article
ISSN
0928-4931

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Titanium containing amorphous carbon (TiC/a-C:H) films were deposited by a hybrid IPVD/PECVD (Ionized Physical Vapor Deposition/Plasma Enhanced Chemical Vapor Deposition) process combining titanium target magnetron sputtering and PECVD in an Ar-CH 4 plasma. Films with various carbon contents have be