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Strip-plot design for two-step processes

✍ Scribed by George A. Milliken; Xiaoyu Shi; Michael Mendicino; P. K. Vasudev

Publisher
John Wiley and Sons
Year
1998
Tongue
English
Weight
235 KB
Volume
14
Category
Article
ISSN
0748-8017

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✦ Synopsis

Conducting experiments across processing steps is important when it is desired to study the interactions among factors where some factors are from one step and the other factors are from the other step. The strip-plot design is a very efficient design, both on resources required and time needed, for studying multiple-step processes. This paper describes the construction and analysis of the strip-plot and split-plot designs. A case study is described where an experiment was run to improve the quality of separation by implantation of oxygen silicon on insulator wafers while reducing costs. In this study the levels of one set of factors are not replicated; thus the half-normal probability plot is used to extract information so that a mixed model can be used to provide estimates of the parameters of the corresponding response surface model. Β©1998 John Wiley & Sons, Ltd.

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