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Stress study of HFCVD boron-doped diamond films by X-ray diffraction measurements

✍ Scribed by Ferreira, N.G.; Abramof, E.; Corat, E.J.; Leite, N.F.; Trava-Airoldi, V.J.

Book ID
122923032
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
261 KB
Volume
10
Category
Article
ISSN
0925-9635

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X-ray diffraction analysis and micro-Raman spectroscopy measurements have been used for stress studies on HFCVD 18 21 diamond films with different levels of boron doping. The boron incorporation in the film varied in the range 10 -10 3 boron / cm . The grain size, obtained from SEM images, showed gr