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Stress, microstructure and mechanical properties of graded multilayer tetrahedral amorphous carbon films

โœ Scribed by Xiao Han; Jiaqi Zhu; Jiecai Han; Manlin Tan; Wei Gao


Book ID
106020981
Publisher
Springer
Year
2008
Tongue
English
Weight
351 KB
Volume
91
Category
Article
ISSN
1432-0630

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Carbon nitride (CN x /CN x ) multilayers with sequential sp 3 -rich and sp 2 -rich layers were deposited on c-Si substrate by direct current magnetron sputtering. The composition, microstructure and morphology of the films were investigated by the X-ray photoelectron spectroscopy and transmission el