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Stress measurements on vacuum evaporated cobalt silicide films on silicon substrates

✍ Scribed by P Aloupojannis; A Travlos; C Papastaikoudis; Ch Hardtke

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 128 KB
Volume: 43
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(92)90141-i

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