Stress-induced mass detection with a micromechanical/nanomechanical silicon resonator

✍ Scribed by Ono, Takahito; Esashi, Masayoshi

• Book ID: 121747157
• Publisher: American Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 727 KB
• Volume: 76
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.2041591