Silicon nanomechanical resonators with a double-triangle cross section leading to an enhanced mass sensitivity

✍ Scribed by De Vlaminck, I.; De Greve, K.; Lagae, L.; Borghs, G.

• Book ID: 121747160
• Publisher: American Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 556 KB
• Volume: 88
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2172236