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Stress engineering and mechanical properties of SU-8-layers for mechanical applications

✍ Scribed by J. Hammacher; A. Fuelle; J. Flaemig; J. Saupe; B. Loechel; J. Grimm


Book ID
106185428
Publisher
Springer-Verlag
Year
2008
Tongue
English
Weight
440 KB
Volume
14
Category
Article
ISSN
0946-7076

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