Stress characterization of undoped and doped laser crystallized poly-Si on different substrates using Raman spectroscopy

✍ Scribed by Philipp Lengsfeld; Norbert H Nickel

• Book ID: 117145448
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 141 KB
• Volume: 299-302
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(01)00982-6