✦ LIBER ✦
Characterization of stress in doped and undoped polycrystalline silicon before and after annealing or oxidation with laser raman spectroscopy
✍ Scribed by M. Kawata; S. Nadahara; J. Shiozawa; M. Watanabe; T. Katoda
- Book ID
- 112816322
- Publisher
- Springer US
- Year
- 1990
- Tongue
- English
- Weight
- 428 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0361-5235
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