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Stress and texture in HIPIMS TiN thin films

✍ Scribed by R. Machunze; A.P. Ehiasarian; F.D. Tichelaar; G.C.A.M. Janssen

Book ID: 111713858
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 372 KB
Volume: 518
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2009.09.069

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