Texture development in polycrystalline thin films

✍ Scribed by Carl.V. Thompson; Roland Carel

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 785 KB
• Volume: 32
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(95)03011-5

✦ Synopsis

The distribution of crystallographic orientations of the grains in a polycrystalline film can evolve through a number of kinetic processes. Orientation evolution can occur before, during and after coalescence of islands to form a continuous film, during thickening of a film, and during post-deposition annealing. The energetic constraints leading to texture selection include surface and interface energy minimization, as well as strain-energy minimization. The final texture of a film depends on which texture-selection mechanisms and driving forces dominate, and is different for different films, substrates, and deposition conditions.