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Strain mapping in MOSFETS by high-resolution electron microscopy and electron holography

✍ Scribed by Florian Hüe; Martin Hytch; Florent Houdellier; Etienne Snoeck; Alain Claverie

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
804 KB
Volume
154-155
Category
Article
ISSN
0921-5107

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