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Strain characterization of FinFETs using Raman spectroscopy

✍ Scribed by Kaleli, B.; van Hemert, T.; Hueting, R.J.E.; Wolters, R.A.M.

Book ID
120262248
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
975 KB
Volume
541
Category
Article
ISSN
0040-6090

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