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Stoichiometry optimization of homoepitaxial oxide thin films using x-ray diffraction

โœ Scribed by LeBeau, James M.; Engel-Herbert, Roman; Jalan, Bharat; Cagnon, Joel; Moetakef, Pouya; Stemmer, Susanne; Stephenson, G. Brian


Book ID
111898179
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
633 KB
Volume
95
Category
Article
ISSN
0003-6951

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Thin Film Analysis by X-Ray Scattering (
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Diffraction effects are observed when electromagnetic radiation impinges on periodic structures with geometrical variations on the length scale of the wavelength of the radiation. The interatomic distances in crystals and molecules amount to 0.15-0.4 nm which correspond in the electromagnetic spectr