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Stoichiometry of a-C:H(Ta) films determined by means of RBS and the 15N technique

✍ Scribed by W. Wagner; F. Rauch; M. Grischke


Book ID
113287282
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
433 KB
Volume
111
Category
Article
ISSN
0168-583X

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