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Stoichiometric changes of Si, CoSi2 and TiSi2 during low energy oxygen bombardment in combination with oxygen bleed-in

✍ Scribed by B. Brijs; J. Deleu; W. Storm; W. De Coster; W. Vandervorst

Book ID: 113287487
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 632 KB
Volume: 118
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)01481-0

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