Stochastic electron heating in a capacitive RF discharge with non-Maxwellian and time-varying distributions

✍ Scribed by Wood, B.P.; Lieberman, M.A.; Lichtenberg, A.J.

• Book ID: 117862443
• Publisher: IEEE
• Year: 1995
• Tongue: English
• Weight: 782 KB
• Volume: 23
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.376565