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Stitching Interferometry: A Flexible Solution for Surface Metrology

✍ Scribed by Murphy, Paul; Forbes, Greg; Fleig, Jon; Dumas, Paul; Tricard, Marc

Book ID
115437146
Publisher
Optical Society of America
Year
2003
Tongue
English
Weight
440 KB
Volume
14
Category
Article
ISSN
1047-6938

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We propose an optical profilometer system for evaluating mirrors that are used for hard X-ray nanofocusing. A surface metrology system designed for these mirrors to focus to a size of 10 nm is required to ensure a precise measurement of a large curvature with a vertical accuracy of 1 nm and a latera