Sticking probability of Ti atoms in magnetron sputtering deposition evaluated from the spatial distribution of Ti atom density

✍ Scribed by Nafarizal, N.; Sasaki, K.

• Book ID: 121221776
• Publisher: AVS (American Vacuum Society)
• Year: 2007
• Tongue: English
• Weight: 417 KB
• Volume: 25
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.2539256