✦ LIBER ✦
Space-resolved velocity and flux distributions of sputtered Ti atoms in a planar circular magnetron discharge
✍ Scribed by Vitelaru, C; de Poucques, L; Minea, T M; Popa, G
- Book ID
- 121447354
- Publisher
- Institute of Physics
- Year
- 2011
- Tongue
- English
- Weight
- 856 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0963-0252
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