Step and repeat UV nanoimprint lithography on pre-spin coated resist film: a promising route for fabricating nanodevices

✍ Scribed by Peroz, C; Dhuey, S; Volger, M; Wu, Y; Olynick, D; Cabrini, S

• Book ID: 120470531
• Publisher: Institute of Physics
• Year: 2010
• Tongue: English
• Weight: 1010 KB
• Volume: 21
• Category: Article
• ISSN: 0957-4484
• DOI: 10.1088/0957-4484/21/44/445301