Digital spectrometer-on-chip fabricated by step and repeat nanoimprint lithography on pre-spin coated films

✍ Scribed by C. Peroz; S. Dhuey; A. Goltsov; M. Volger; B. Harteneck; I. Ivonin; A. Bugrov; S. Cabrini; S. Babin; V. Yankov

• Book ID: 104052846
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 586 KB
• Volume: 88
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2010.12.078