✦ LIBER ✦

Status report on X-ray lithography

✍ Scribed by John D. Wiley

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The center for X-ray lithography facilit

✍ G.M. Wells; E.L. Brodsky; M. Reilly; J.W. Taylor; F. Cerrina 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 386 KB

X-ray lithography company formed

📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 706 KB

Synchrotrom radiation X-ray lithography

✍ R.P. Haelbich; J.P. Silverman; J.M. Warlaumont 📂 Article 📅 1984 🏛 Elsevier Science ⚖ 1023 KB

X-ray lithography beamlines at Aladdin

✍ G.M. Wells; B. Lai; D. So; R. Redaelli; F. Cerrina 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 731 KB

Novel beamline optics for x-ray lithogra

✍ R.K. Cole; F. Cerrina 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 277 KB

A radiation source for x-ray lithography

✍ E. Cullmann; F. Richter; P. Thompson; M. Gentili 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 276 KB