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Status and prospects of UV-Nanoimprint technology

✍ Scribed by M. Bender; A. Fuchs; U. Plachetka; H. Kurz

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 179 KB
Volume: 83
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.01.220

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