Stacking fault structures in carbon-contaminated low-temperature epitaxial silicon

✍ Scribed by Ogden, R. ;Bradley, R. R. ;Watts, B. E.

• Publisher: John Wiley and Sons
• Year: 1974
• Tongue: English
• Weight: 907 KB
• Volume: 26
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2210260112