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Stable ohmic contact to GaAs with TiN diffusion barrier

✍ Scribed by M.F. Zhu; A.H. Hamdi; M.-A. Nicolet; J.L. Tandon

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 313 KB
Volume: 119
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(84)90152-4

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