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Stability of thin copper films on mesoporous dielectrics

✍ Scribed by R. Saxena; W. Cho; O. Rodriguez; W.N. Gill; J.L. Plawsky

Book ID
116668276
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
521 KB
Volume
350
Category
Article
ISSN
0022-3093

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Copper on sapphire: Stability of thin fi
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✍ Kennefick, C.M.; Raj, R. πŸ“‚ Article πŸ“… 1989 πŸ› Elsevier Science βš– 783 KB

Thin films of copper deposited on the (1120) plane of sapphire disintegrated into clusters when annealed at 650Β°C under nonoxidizing conditions. The breakdown was found to initiate at processing defects in the film; this is in contrast to earlier work with zirconia films on sapphire where cavities n